Ion beam profiling from the interaction with a freestanding 2D layer
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چکیده
منابع مشابه
Ion beam profiling from the interaction with a freestanding 2D layer
Recent years have seen a great potential of the focused ion beam (FIB) technology for the nanometer-scale patterning of a freestanding two-dimensional (2D) layer. Experimentally determined sputtering yields of the perforation process can be quantitatively explained using the binary collision theory. The main peculiarity of the interaction between the ion beams and the suspended 2D material lies...
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ژورنال
عنوان ژورنال: Beilstein Journal of Nanotechnology
سال: 2017
ISSN: 2190-4286
DOI: 10.3762/bjnano.8.73